■ For Semiconductor Manufacturing Equipment
Hot plate
Operating temperature range: 60ºC–400ºC
Performance: Temperature distribution on wafer: temperature range of 0.2ºC @ 180ºC
Plate material: AL, SUS, SiC, etc.
Heater: Mica heater, polyimide heater, etc.
These hot plates are employed for the preliminary coating and development steps in semiconductor manufacturing equipment. They can be made of SiC, which can tolerate high temperatures.
Cooling plate
Plate material: AL
Pipe material: AL, SUS, etc.
Coolant: Air, water
These cooling plates are installed in semiconductor manufacturing equipment and are used in insulation panels as well as for basic cooling functions.
■ Heater Unit
Small water heater
Operating temperature range: Please ask us.
Compact designs that save weight. We can handle everything from development and design to manufacturing.
Heat plate for packaging machine
Operating temperature range: 60ºC–250ºC
Plate material: AL, SUS etc.
Heater: Mica heater, cartridge heater, etc.
These heat plates are incorporated into packaging machines and used for heating film, sealing, and molding, etc.
■ Rubber Heaters
Single piece of silicone rubber
Shape: Can be designed to fit the heated object
Silicone rubber is flexible and heats uniformly, and can be manufactured in a shape that matches the object to be heated.
For medical use (peritoneal dialysis fluid heater)
Keeps the temperature at a constant 37ºC.
